Specifications
RF-Power – 300 W
Target Diameter: 2 inches
Substrate to target distance: 8 inches
Substrate heating: 250 0C
Substrate Rotation: 200 rpm.
Pump: Rotary and Diffusion
Vacuum: 2×10-6
Applications:
- Fabrication of Nano-structured thin films and coatings ( 1 nm to hundreds of nm).
- Preparation of Li and Na battery electrodes.
- Preparation of Solar cell devices .
- Deposition of Multi-layers for magnetic tunnel junctions.
- Fabrication of optical planar waveguides and photonic microcavities operating in the visible and NIR regions.
